CVD Furnace

System Features

Technical Specifications

  • Max. Temperature:  Upto 1100 °C
  • Continuous working temperature:  upto 1000 °C
  • Max. Heating Rate: 10°C /min
  • Heating Zone:  Single
  • Temperature Controller:  PID temperature controller with K type thermocouple
  • Heating Element:  SIC Heating Rod/ Fe-Cr-Al Alloy doped by Mo
  • Processing Tube: Quartz Tube 2”/3”/4”
  • Vacuum Pressure: 10-3 mbar rough vacuum/ 10-5 mbar high vacuum
  • Vacuum Flanges: Water Cooled/ Non Water Cooled
  • Vacuum Pump: Rotary Venn Pump/ Turbo Molecular Pump

optional Items

  • Rapid Cooling System for grapheme growth
  • Mass Flow Controller with Display
  • PLC/PC Automation
  • Water Chiller