E Beam Evaporation System

“APT Make E Beam Evaporation Systems designed for  Electron Beam Evaporation of materials  on to a substrate with E Beam sources and the evaporation would be done in a high vacuum contamination free chamber”

System Features

Technical Specifications

  • Single or Multi E-beam evaporation source of different size with E beam power supply
  • SS 304 make chamber with electro-polished from inner as well as outer side
  • Substrate holders with rotation
  • High Vacuum compatible view port
  • High vacuum pumping system
  • Vacuum Gauges

Optional Items

  • RF Power supply with auto matching network
  • DC/ Pulsed DC
  • Assymetric Bi-polar Pulsed DC Power supply