SEM Sputter Coater

SEM sputter coater suitable for SEM, TEM and other thin film applications. Compact easy to operate table top model suitable for SEM sputtering with noble metals like Au, Pd, Au/Pd, Pt.

System Features

Technical Specifications

  • Rotary pump based pumping system
  • Easy to operate substrate holder/ sample stage
  • Magnetron Sputter head
  • Provision for thickness monitor
  • Manual or Fully automatic, touch screen control

Optional Items

  • Dry scroll pump for clean room application
  • Turbo molecular pumping system for high vacuum application
  • SS304 make process chamber
  • High resolution thickness monitor/controller to measure/control deposition thickness