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SEM SPUTTER COATER
Bench Top, Low Cost
SEM Sputter Coating System


      In March 2000 APT introduced a compact, fully automated desktop SEM Sputter Coater with Fast cycle times and extremely low cost. The clamped target cathode design allows quick change of targets and allows a wide range of target metals to be used. The SEM coater allows user control of sputter power, time and pressure.


Process Capability
  • Repeatable control of coating thickness
  • Fully Automatic (One push button Operation - Microprocessor based; safety interlocked)
  • LED Display for Pressure, Time and Power
  • Holds upto 6 SEM stubs
  • High Efficiency DHRUVA Planar Magnetron Cathode
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  System Specifications
    Process Chamber
    5" dia. x ht. 5" Glass Chamber
    Vacuum
    High-speed direct-drive two-stage rotarypump (mounted on an antivibration table)
    Footprint
    Combining Sputter control Unit and Pumping System(18" x 26" )
    Controls
    Automatic - Microprocessor controlled
    Target
    High Efficiency "DHRUVA" Planar Magnetron Cathode 2.5" dia.
    Cycle Time
    10 minutes (for normal SEM metallizer application)
    Sample Table
    Holds 6 SEM stubs
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