Customized PVD Coating Systems Catalogue

Cathodic Arc Deposition & Magnetron Sputtering

Designed & Manufactured in India

Overview

Advanced Process Technology Pvt. Ltd. (APT), established in 2000 and based in Pune, India, is a leading Original Equipment Manufacturer (OEM) of advanced vacuum and thin film deposition systems. APT specializes in custom-designed Physical Vapor Deposition (PVD) coating systems for R&D, pilot-scale, and industrial production applications.

All APT PVD systems are designed, engineered, manufactured, assembled, and tested in India, ensuring high reliability, customization flexibility, and dependable long-term support for global customers.

PVD Coating Technologies Offered

1. Cathodic Arc Deposition Systems

APT Cathodic Arc PVD systems generate a highly ionized metal plasma using a low-voltage, high-current arc on solid cathode targets. This technology is well suited for producing hard, dense, and strongly adherent coatings.

Key Features

• High-current cathodic arc sources (single or multi-cathode)
• High ionization efficiency for dense coatings
• Optional macroparticle filters for defect reduction
• Reactive gas capability for nitride, carbide, and oxide coatings
• Substrate biasing (DC / Pulsed DC)
• Excellent coating adhesion on complex 3D substrates  

Typical Coatings

• TiN, CrN, TiAlN, AlCrN
• DLC and metal-based hard coatings
• Wear-resistant and decorative coatings

Applications

• Cutting and forming tools
• Automotive and aerospace components
• Biomedical implants
• Industrial wear protection

2. Magnetron Sputtering Systems

APT Magnetron Sputtering PVD systems provide precise thickness control, excellent uniformity, and low defect density, making them ideal for functional and optical thin films.

Key Features

• DC, Pulsed DC, and RF sputtering options
• Planar and cylindrical magnetron cathodes
• Multi-target configuration for multilayer coatings
• Reactive sputtering for oxides and nitrides
• Superior film uniformity on large-area substrates

Typical Coatings

• Optical and anti-reflection coatings
• Transparent conductive oxides (ITO, AZO)
• Metallic and dielectric thin films
• Decorative coatings

Applications

• Optical components and displays
• Electronics and sensor devices
• Research laboratories
• Architectural and decorative coatings

System Design & Customization

APT specializes in fully customized PVD system design, tailored to customer-specific process requirements.

Customizable options include:

• Vacuum chamber geometry (cylindrical / rectangular / load-lock)
• Substrate size, fixtures, and planetary rotation
• Batch or inline processing
• Manual, semi-automatic, or fully automatic operation
• Integration of Arc, Sputtering, and PECVD in a single platform
• Substrate heating systems
• PLC or PC-based recipe-driven control systems

Technical Specifications

Vacuum Chamber

• Material: SS304 / SS316L (Electropolished)
• Chamber Diameter: 400 mm to 1200 mm (custom sizes available)
• Chamber Height: As per process requirement
• Door Type: Front / Vertical lift / Hinged

Vacuum Performance

• Base Pressure: ≤ 5 × 10⁻⁶ mbar
• Pumping System: Turbo Molecular Pump + Dry/Rotary Backing Pump
• Pumping Speed: 500 – 3000 L/s (configurable)

Cathodic Arc Source (if applicable)

• Arc Current: 50 – 150 A
• Target Diameter: 50 – 100 mm
• Number of Cathodes: 1 to 6 (custom)
• Macroparticle Filter: Optional 

Magnetron Sputtering Source (if applicable)

• Power Supply: DC / Pulsed DC / RF
• Power Range: Up to 10 kW per cathode
• Target Size: 2″ to 8″ or rectangular planar targets
• Number of Cathodes: 1 to 8 (custom)

Substrate Handling

• Substrate Size: Up to Ø 600 mm or equivalent
• Rotation: Single / Planetary
• Bias Voltage: Up to 1000 V (DC / Pulsed)

Process Gases

• Argon, Nitrogen, Oxygen, Acetylene (as required)
• Gas Control: Mass Flow Controllers (MFC)

Heating System

• Type: Radiant / Resistive
• Temperature Range: Ambient to 500 °C

Control System

• PLC-based or PC-based HMI
• Recipe storage and process logging
• Data recording and alarms

Applications

• R&D laboratories and academic institutes
• Tool coating and wear-resistant coatings
• Automotive and aerospace industries
• Electronics and optoelectronics
• Medical and biomedical devices

Why Choose APT PVD Systems?

• Original Equipment Manufacturer (OEM)
• Fully customized system design
• Proven vacuum and thin film expertise
• Integration of multiple coating technologies
• Designed & manufactured in India
• Global service and technical support

High-Performance Thin Film & Vacuum Solutions

For detailed discussions, customization, and quotations,  please contact APT sales and engineering team.