E Beam Evaporation System
APT Make E Beam Evaporation Systems designed for Electron Beam Evaporation of materials on to a substrate with E Beam sources and the evaporation would be done in a high vacuum contamination free chamber.
System Features
- Single or Multi E-beam evaporation source of different size with E beam power supply
- SS 304 make chamber with electro-polished from inner as well as outer side
- Substrate holders with rotation
- High Vacuum compatible view port
- High vacuum pumping system
- Vacuum Gauges
- RF Power supply with auto matching network
- DC/ Pulsed DC
- Assymetric Bi-polar Pulsed DC Power supply
